Barium Zirconate, BaZrO3
Barium zirconate (BaZrO3) sputtering targets from Infinita Materials deliver a chemically stable, high-melting-point perovskite oxide engineered for demanding thin-film applications. Valued for its low dielectric loss, high ionic conductivity when doped, and exceptional thermal and chemical stability, BaZrO3 is a preferred material for superconducting buffer layers, solid oxide fuel cell electrolyte films, and refractory dielectric coatings.
| Purity (%) : | >99.9 |
| Dimensions : | Dia. 1”, Thick. 0.125” Dia. 2”, Thick. 0.25” |
Introduction to Barium Zirconate
Barium Zirconate (BaZrO₃) is a cubic perovskite oxide (Pm-3m) composed of corner-sharing ZrO₆ octahedra with Ba²⁺ occupying the twelve-coordinate A-sites. Its rigid structure provides a high melting point of approximately 2500–2700 °C, excellent chemical stability, low thermal expansion, and strong electrical insulation with low dielectric loss. As a sputtering target, dense BaZrO₃ enables uniform, adherent films with controlled stoichiometry and thickness. RF or pulsed-DC magnetron sputtering is widely used to deposit BaZrO₃ buffer layers beneath YBCO and other REBCO superconducting films, where chemical inertness and lattice compatibility help limit interdiffusion. Sputtered BaZrO₃ is also used for low-loss dielectric layers, refractory protective coatings, and templates for yttrium-doped proton-conducting electrolyte films.
FAQs
Introduction to Barium Zirconate
Barium Zirconate (BaZrO₃) is a cubic perovskite oxide (Pm-3m) composed of corner-sharing ZrO₆ octahedra with Ba²⁺ occupying the twelve-coordinate A-sites. Its rigid structure provides a high melting point of approximately 2500–2700 °C, excellent chemical stability, low thermal expansion, and strong electrical insulation with low dielectric loss. As a sputtering target, dense BaZrO₃ enables uniform, adherent films with controlled stoichiometry and thickness. RF or pulsed-DC magnetron sputtering is widely used to deposit BaZrO₃ buffer layers beneath YBCO and other REBCO superconducting films, where chemical inertness and lattice compatibility help limit interdiffusion. Sputtered BaZrO₃ is also used for low-loss dielectric layers, refractory protective coatings, and templates for yttrium-doped proton-conducting electrolyte films.
Key Properties of Barium Zirconate
| Property | Value | Significance |
|---|
| Chemical formula | BaZrO3 | Confirms 1:1:3 barium-zirconium-oxygen stoichiometry required for phase-pure perovskite films |
| Crystal structure | Cubic perovskite, space group Pm-3m | Enables low-strain epitaxial growth on common oxide substrates used for superconducting buffer layers |
| Molar mass | ~276.55 g/mol | Used to calculate target consumption rates and deposition mass balance |
| Density | ~5.52 g/cm3 | Determines target mass for a given geometry and informs sputter yield and burn-life estimates |
| Melting point | ~2500 – 2700 C | Reflects the refractory character of the compound and its resistance to thermal degradation during sputtering |
| Band gap | ~5 – 5.3 eV | Wide-gap insulating behaviour in the undoped state supports use as a dielectric thin film. |
| Dielectric loss | Low, relative to other perovskite zirconates | Supports use in low-loss substrate and buffer layer applications for RF and superconducting devices |
| Ionic conductivity (doped) | High when acceptor-doped (e.g., Y-substituted) | Basis for use as a proton-conducting electrolyte film in solid oxide fuel cell research |
Types & Grades of Barium Zirconate
Barium Zirconate targets are offered in standard catalogue sizes and grades, with custom purity, density, and geometry available for OEM and R&D deposition systems.
| Grade / Form | Typical Purity | Key Features / Uses |
|---|
| Standard sputtering grade | 99.9% | General-purpose disc targets for dielectric and buffer-layer film deposition |
| High-purity grade | 99.95% – 99.99% | Reduced trace-metal content for low-loss superconducting buffer layers and research-grade films |
| Hot-pressed ceramic target | 99.9% | High relative density for stable, long-life magnetron sputtering with minimal particulate generation |
| Yttrium-doped (BZY) target | 99.9%, custom stoichiometry | Formulated for proton-conducting electrolyte thin films used in solid oxide fuel cell development |
| Bonded target assembly | 99.9% | Indium- or elastomer-bonded to a copper backing plate for improved thermal dissipation during extended sputtering runs. |
Applications of Barium Zirconate
Sputtered films of Barium Zirconate support demanding roles across research and production applications where this material’s specific structural, electronic, or optical properties are the key requirement.
| Industry | Application | Function |
|---|
| Superconducting electronics | Buffer and template layers for YBCO/REBCO coated conductors | Provides a chemically inert, lattice-matched interlayer that blocks cation interdiffusion into the superconducting film |
| Solid oxide fuel cells | Yttrium-doped BaZrO3 (BZY) proton-conducting electrolyte films | Delivers high proton conductivity at elevated operating temperature with strong chemical stability |
| Microelectronics | Low-loss dielectric and insulating thin films | High resistivity and low dielectric loss support use in multilayer capacitor and interconnect structures |
| Optical coatings | Refractive-index matching and protective optical layers | Chemical and thermal stability preserve optical film performance under demanding conditions |
| High-temperature sensors | Thin-film sensing elements for gas and ionic species | Combines chemical inertness with tunable ionic conductivity when doped |
| Refractory and protective coatings | Functional coatings for high-temperature components and glass surfaces | Resists thermal degradation and chemical attack in demanding processing environments |
Why Partner with Infinita Materials?
- Technical Depth: in-house quality control with ICP-MS and XRF purity verification, density measurement, and full certificates of analysis on every target.
- Global Logistics: reliable supply from single R&D-scale targets to production-line volumes, with established international shipping.
- Responsive Support: direct access to materials engineers for grade, bonding, and geometry selection, and process-compatibility questions.
Take the Next Step
Infinita Materials fabricates Barium Zirconate sputtering targets engineered to the purity, density, and geometry your deposition process requires. Whether the requirement is a standard catalogue target or a custom size, purity, or bonded assembly, our team can help match the right specification to your deposition system. Request a quote or speak with our technical team to discuss your target specification.
Frequently Asked Questions
Barium Zirconate, BaZrO3
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