Strontium Ruthenate (SrRuO3) is a conductive perovskite oxide supplied by Infinita Materials as a high-density ceramic sputtering target for advanced oxide thin-film applications. Unlike most oxide ceramics, SrRuO3 combines metallic electrical conductivity with a robust perovskite crystal structure, making it the electrode material of choice beneath ferroelectric, magnetic, and other functional oxide device layers.
SrRuO₃ is a distorted orthorhombic GdFeO₃-type perovskite (Pbnm/Pnma) composed of corner-sharing RuO₆ octahedra with Sr²⁺ occupying the A-sites. Unlike many perovskite oxides, it is a moderately correlated metal, with conductivity arising from hybridised Ru 4d and O 2p states. Below approximately 150–160 K, SrRuO₃ becomes an itinerant ferromagnet with strong magnetocrystalline anisotropy. Its conductivity and structural compatibility with SrTiO₃ and DyScO₃ make it valuable for oxide heterostructures. RF or DC magnetron sputtering enables controlled film deposition. SrRuO₃ films serve as conductive electrodes, seed and buffer layers, and ferromagnetic components in ferroelectric memories, resistive-switching devices, spintronics, and correlated-oxide research.
Answer: SrRuO₃ sputtering targets are used for the deposition of thin films with high conductivity, stability, and magnetic properties, ideal for applications in electronics, fuel cells, and catalysis.
Answer: SrRuO₃ offers excellent electrical conductivity and stability at high temperatures, making it ideal as an electrode material in solid oxide fuel cells (SOFCs).
Answer: SrRuO₃ nanoparticle can be weakly ferromagnetic or paramagnetic, depending on its composition and structure, making it useful in magnetic device applications.
Answer: SrRuO₃ functions as a highly conductive material with metallic behavior, which is beneficial for its use in thin-film transistors and as a gate electrode in electronic devices.
Answer: Yes, SrRuO₃ is utilized in catalysis, particularly in energy conversion processes like the oxygen evolution reaction (OER), thanks to its high catalytic activity and stability.
SrRuO₃ is a distorted orthorhombic GdFeO₃-type perovskite (Pbnm/Pnma) composed of corner-sharing RuO₆ octahedra with Sr²⁺ occupying the A-sites. Unlike many perovskite oxides, it is a moderately correlated metal, with conductivity arising from hybridised Ru 4d and O 2p states. Below approximately 150–160 K, SrRuO₃ becomes an itinerant ferromagnet with strong magnetocrystalline anisotropy. Its conductivity and structural compatibility with SrTiO₃ and DyScO₃ make it valuable for oxide heterostructures. RF or DC magnetron sputtering enables controlled film deposition. SrRuO₃ films serve as conductive electrodes, seed and buffer layers, and ferromagnetic components in ferroelectric memories, resistive-switching devices, spintronics, and correlated-oxide research.
Close structural and lattice match to SrTiO3 and DyScO3 substrates enables low-defect epitaxial electrode growth
Lattice Parameters
a ~5.53, b ~5.57, c ~7.85 Angstrom (orthorhombic, room temperature)
Governs epitaxial strain state and film quality when grown on common perovskite substrates
Molar Mass
~236.69 g/mol
Basis for stoichiometry calculations and deposition-rate/thickness control during sputtering
Density (theoretical)
~6.4 g/cm3
Supports a high-density, low-porosity target with stable erosion behaviour and reduced particulate generation
Electrical Behavior
Metallic conductor; moderately correlated metal with resistivity that stays low across a wide temperature range
Permits DC or pulsed-DC magnetron sputtering in addition to RF, unlike most insulating oxide perovskite targets
Magnetic Behavior
Itinerant ferromagnet below a Curie temperature of ~150-160 K, with strong magnetocrystalline anisotropy
Basis for use as a magnetic conductive layer in spintronic and correlated-oxide heterostructure research
Thermal Stability
No sharp congruent melting point; the perovskite phase is thermally stable to roughly the 1400-1600 C range before ruthenium volatilisation and decomposition become significant
Sets practical upper bounds on sputtering power density, substrate anneal temperature, and target bonding process limits
Thermal Conductivity
~5-6 W/(m-K)
Moderate value that informs heat dissipation planning and backing-plate bonding requirements during high-power sputtering
Types & Grades of Strontium Ruthenate
Strontium Ruthenate targets are offered in standard catalogue sizes and grades, with custom purity, density, and geometry available for OEM and R&D deposition systems.
Grade / Form
Typical Purity
Key Features / Uses
Standard catalogue target (IN-RuSr-01)
>99.9% (3N)
1 in diameter x 0.125 in thick disc, sized for common lab and pilot magnetron sputtering platforms
Standard catalogue target (IN-RuSr-02)
>99.9% (3N)
2 in diameter x 0.25 in thick disc, common size for bottom-electrode and thin-film device research runs
High-purity grade
99.99% (4N) – 99.999% (5N)
Reduced trace-metal content for spintronic, magnetotransport, and correlated-oxide research sensitive to impurity scattering
Large-format / custom planar target
>99.9%, custom purity on request
Rectangular or planar targets machined to specific chamber cathode dimensions for pilot and production-scale coaters
Bonded target assembly
>99.9% – 99.99%
SrRuO3 tile indium- or elastomer-bonded to a copper backing plate to manage this brittle ceramic’s thermal-stress risk under sustained high-power operation
Applications of Strontium Ruthenate
Sputtered films of Strontium Ruthenate support demanding roles across research and production applications where this material’s specific structural, electronic, or optical properties are the key requirement.
Industry
Application
Function
Semiconductor / ferroelectric memory
Bottom electrode beneath PZT, PLZT, and BST ferroelectric capacitor stacks
Electrode layer beneath ferroelectric or resistive-switching oxide films
Chemically stable, oxidation-resistant conductive contact compatible with oxide deposition chemistries
Spintronics and correlated-oxide research
Epitaxial SrRuO3 films grown on SrTiO3 or DyScO3 substrates
Itinerant ferromagnet layer used in spin-valve, magnetic tunnel junction, and magnetotransport studies
Oxide superconductor research
Seed and buffer layers for Sr2RuO4 and related ruthenate heterostructures
Lattice-matched conductive template supporting epitaxial growth of ruthenate superconductor thin films
Energy and electrochemical research
Conductive oxide films and electrodes for photoelectrochemical and catalytic studies
Stable, conductive perovskite matrix suited to electrochemical and catalytic thin-film testing
Academic and national-laboratory thin-film research
Sputtering source material for oxide MBE/PLD comparison and complex-oxide superlattice studies
Provides a well-characterised conductive perovskite layer for benchmarking against other deposition techniques
Why Partner with Infinita Materials?
Technical Depth: in-house quality control with ICP-MS and XRF purity verification, density measurement, and full certificates of analysis on every target.
Global Logistics: reliable supply from single R&D-scale targets to production-line volumes, with established international shipping.
Responsive Support: direct access to materials engineers for grade, bonding, and geometry selection, and process-compatibility questions.
Take the Next Step
Infinita Materials fabricates Strontium Ruthenate sputtering targets engineered to the purity, density, and geometry your deposition process requires. Whether the requirement is a standard catalogue target or a custom size, purity, or bonded assembly, our team can help match the right specification to your deposition system. Request a quote or speak with our technical team to discuss your target specification.
Other Related Product to Strontium Ruthenate, SrRuO3
SrRuO₃ sputtering targets are used for the deposition of thin films with high conductivity, stability, and magnetic properties, ideal for applications in electronics, fuel cells, and catalysis.
SrRuO₃ offers excellent electrical conductivity and stability at high temperatures, making it ideal as an electrode material in solid oxide fuel cells (SOFCs).
SrRuO₃ nanoparticle can be weakly ferromagnetic or paramagnetic, depending on its composition and structure, making it useful in magnetic device applications.
SrRuO₃ functions as a highly conductive material with metallic behavior, which is beneficial for its use in thin-film transistors and as a gate electrode in electronic devices.
Yes, SrRuO₃ is utilized in catalysis, particularly in energy conversion processes like the oxygen evolution reaction (OER), thanks to its high catalytic activity and stability.
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