Cerium Oxide, CeO2
Cerium oxide (CeO2) sputtering targets from Infinita Materials deliver a dense, high-purity fluorite-structured ceria source for thin-film deposition across superconductor, energy, and optical coating applications. Supplied by Infinita Materials in standard 1 in. and 2 in. disc formats and custom planar geometries, these targets combine chemical stability with tunable oxygen-vacancy behaviour to support demanding PVD processes. Purity grades from 99.9% to 99.99% accommodate both functional coating work and research-grade epitaxial film growth. Each target is manufactured to consistent density and grain structure for stable, reproducible sputter rates.
| Purity (%) : | >99.9 |
| Dimensions : | Dia. 1”, Thick. 0.125” Dia. 2”, Thick. 0.25” |
Introduction to Cerium Oxide
Cerium Oxide (CeO₂) is a fluorite-structured ceramic (Fm-3m) containing eight-coordinate Ce⁴⁺ and four-coordinate O²⁻ ions. Its open lattice readily accommodates oxygen vacancies, enabling reversible Ce⁴⁺/Ce³⁺ redox behaviour that provides oxygen-ion transport, mixed conductivity, and strong catalytic activity. With a melting point near 2,400 °C and good chemical stability, CeO₂ is suitable for demanding thin-film applications. As a sputtering target, dense high-purity CeO₂ enables uniform, stoichiometric films with controlled thickness and excellent substrate compatibility. Sputtered CeO₂ is widely used as an epitaxial buffer layer for YBCO coated conductors, as well as in solid oxide fuel-cell components, catalyst layers, oxygen sensors, optical and anti-reflective coatings, and emerging semiconductor dielectric applications.
FAQs
Introduction to Cerium Oxide
Cerium Oxide (CeO₂) is a fluorite-structured ceramic (Fm-3m) containing eight-coordinate Ce⁴⁺ and four-coordinate O²⁻ ions. Its open lattice readily accommodates oxygen vacancies, enabling reversible Ce⁴⁺/Ce³⁺ redox behaviour that provides oxygen-ion transport, mixed conductivity, and strong catalytic activity. With a melting point near 2,400 °C and good chemical stability, CeO₂ is suitable for demanding thin-film applications. As a sputtering target, dense high-purity CeO₂ enables uniform, stoichiometric films with controlled thickness and excellent substrate compatibility. Sputtered CeO₂ is widely used as an epitaxial buffer layer for YBCO coated conductors, as well as in solid oxide fuel-cell components, catalyst layers, oxygen sensors, optical and anti-reflective coatings, and emerging semiconductor dielectric applications.
Key Properties of Cerium Oxide
| Property | Value | Significance |
|---|
| Chemical Formula | CeO2 | Confirms stoichiometric cerium(IV) oxide (ceria) rather than a mixed-valence or sub-stoichiometric phase |
| CAS Number | 1306-38-3 | Standard identifier for procurement, safety documentation, and customs classification |
| Molar Mass | ~172.12 g/mol | Used for target mass, deposition rate, and film thickness calculations |
| Crystal Structure | Cubic fluorite, space group Fm-3m | Open lattice accommodates oxygen vacancies, enabling redox activity and ionic conduction |
| Theoretical Density | ~7.215 g/cm3 | Reference value for target densification checks and sputter-rate estimation |
| Melting Point | ~2400 C (2670 K) | High thermal stability supports sustained sputtering without target melting or excessive grain growth |
| Thermal Conductivity | ~4.9 W/m-K | Moderate heat dissipation informs target bonding and cooling requirements during deposition. |
| Optical/Electronic Character | Wide-bandgap n-type semiconductor (~3.1-3.4 eV) | Supports use in transparent, UV-absorbing, and high-k dielectric thin-film applications |
Types & Grades of Cerium Oxide
Cerium Oxide targets are offered in standard catalogue sizes and grades, with custom purity, density, and geometry available for OEM and R&D deposition systems.
| Grade / Form | Typical Purity | Key Features / Uses |
|---|
| Standard sputtering grade | 99.9% (3N) | Cost-effective grade for decorative, functional, and general PVD coating work |
| High-purity grade | 99.95% | Reduced impurity content for optical and display coatings sensitive to defect scattering |
| Ultra-high-purity grade | 99.99% (4N) | preferred for semiconductor research, high-k dielectric films, and reproducible epitaxial growth |
| Research grade | 99.999% (5N), available on request | used in SOFC electrolyte studies and fundamental thin-film epitaxy work requiring minimal contamination |
| Doped ceria targets (Gd-, Sm-, Y-doped CeO2) | custom purity and dopant level | Engineered oxygen-vacancy concentration for tailored ionic conductivity in fuel cell and sensor films |
Applications of Cerium Oxide
Sputtered films of Cerium Oxide support demanding roles across research and production applications where this material’s specific structural, electronic, or optical properties are the key requirement.
| Industry | Application | Function |
|---|
| Superconducting tape (coated conductors) | CeO2 epitaxial buffer layer on textured metal substrates | Provides a lattice-matched template that blocks metal diffusion and enables biaxially textured YBCO growth |
| Energy and fuel cells | Solid oxide fuel cell electrolyte and catalyst thin films | Supports oxygen-ion conduction and catalytic oxygen reduction/oxidation at the electrode-electrolyte interface |
| Optics and photonics | Anti-reflective coatings and precision optical films | High refractive index and UV absorption improve light management and surface protection |
| Semiconductor devices | High-k gate dielectric and passivation research films | Reduces gate leakage current relative to conventional SiO2 in advanced device structures |
| Automotive and architectural glass | UV-blocking and functional glass coatings | absorbs ultraviolet radiation while maintaining visible-light transparency |
| Display and photovoltaic devices | Transparent functional and buffer layers | combines optical transparency with chemical and thermal stability in multilayer stacks |
Why Partner with Infinita Materials?
- Technical Depth: in-house quality control with ICP-MS and XRF purity verification, density measurement, and full certificates of analysis on every target.
- Global Logistics: reliable supply from single R&D-scale targets to production-line volumes, with established international shipping.
- Responsive Support: direct access to materials engineers for grade, bonding, and geometry selection, and process-compatibility questions.
Take the Next Step
Infinita Materials fabricates Cerium Oxide sputtering targets engineered to the purity, density, and geometry your deposition process requires. Whether the requirement is a standard catalogue target or a custom size, purity, or bonded assembly, our team can help match the right specification to your deposition system. Request a quote or speak with our technical team to discuss your target specification.
Frequently Asked Questions
Cerium Oxide, CeO2
Used in Various Industries
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