Calcium Titanate, CaTiO3

Calcium titanate (CaTiO3) sputtering targets engineered for dielectric, buffer-layer, and biocompatible thin-film applications. As the archetype perovskite oxide, CaTiO3 targets provide a stable, high-purity source material for RF magnetron sputtering across electronics, oxide-epitaxy, and biomedical coating processes. Each target is produced to controlled purity and dimensional tolerances to support consistent film stoichiometry and adhesion.

Purity (%) :>99.9
Dimensions :Dia. 1”, Thick. 0.125” Dia. 2”, Thick. 0.25”
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Introduction to Calcium Titanate

Calcium Titanate (CaTiO₃) is an orthorhombic perovskite oxide (Pbnm) in which Ca²⁺ occupies the A-site and Ti⁴⁺ is coordinated by corner-sharing TiO₆ octahedra. It is a chemically and thermally stable electrical insulator with a wide bandgap of approximately 3.5 eV, a theoretical density near 4.10 g/cm³, and a melting point around 1,975 °C. Because CaTiO₃ is insulating, RF magnetron sputtering is typically used to deposit dense, stoichiometric thin films with controlled thickness and composition. Sputtered CaTiO₃ is valuable for high-k dielectric and capacitor layers, thin-film transistor structures, perovskite buffer and template layers, biocompatible coatings for titanium implants, and rare-earth-doped luminescent films.

FAQs

Question: What types of substrates are compatible with CaTiO₃ sputter targets?

Answer: Typical substrates for CaTiO₃ thin films are silicon, glass, sapphire, and several other materials, which have good thermal and electrical properties, depending on the specific application.

Question: What are the advantages of using CaTiO₃ in sputtering?

Answer: CaTiO₃ has a substantial dielectric constant, low electrical loss, and piezoelectric properties that make this compound suitable for energy storage in capacitors, memory devices, and sensor applications. Sputtering enables the deposition of thin films with controllable and tailored properties.

Question: What types of devices can be made from CaTiO₃ sputtered films?

Answer: Multilayer ceramic capacitors (MLCCs), piezoelectric sensors, actuators, thermoelectric devices, ferroelectric memory devices (FeRAM), and optoelectronic components like LEDs.

Question: Can calcium titanate targets be sputtered using DC power?

Answer: No. CaTiO3 is electrically insulating, so RF magnetron sputtering is required to prevent charge buildup on the target surface; DC sputtering of this material is not practical for stable, consistent deposition.