Lithium Phosphate (Li3PO4) sputtering targets from Infinita Materials are engineered for the reactive deposition of LiPON solid-electrolyte thin films used in next-generation solid-state and thin-film battery stacks. Each target is produced from stoichiometric, phase-pure Li3PO4 ceramic to support stable, low-particulate RF and reactive DC/RF sputtering. Standard 1 in. and 2 in. research discs ship from stock, with custom sizes, bonding, and purity grades available on request. All material is supplied and quality-verified by Infinita Materials.
Lithium phosphate (Li₃PO₄) is an orthorhombic, wide-bandgap insulating ceramic composed of PO₄ tetrahedra and Li⁺ ions. Its chemical and thermal stability, low electronic conductivity, and moderate dielectric constant make it suitable for solid-state electrochemical applications. Li₃PO₄ is particularly valuable as a sputtering target because RF magnetron sputtering in a nitrogen-containing plasma can produce lithium phosphorus oxynitride (LiPON), an amorphous solid electrolyte with improved Li⁺ conductivity, strong electronic insulation, and excellent electrochemical stability. Sputtered LiPON layers provide dense, pinhole-free electrolyte films for thin-film and solid-state batteries. Applications include microbatteries for MEMS, wearable and implantable electronics, electrochromic devices, and other miniaturised energy-storage systems.
Answer: Due to its high ionic conductivity and stability, Lithium Phosphate is commonly used in sputtering to create thin films for applications like solid-state batteries, thin-film capacitors, and optical coatings.
Answer: Li₃PO₄ offers excellent thermal stability, a wide electrochemical window, and good substrate adherence, making it ideal for energy storage and semiconductor devices.
Answer: Compared to other lithium compounds, Li₃PO₄ provides enhanced chemical stability, high purity, and consistent film quality, which is critical for high-performance devices.
Answer: Li₃PO₄ thin films can be deposited on a range of substrates, including glass, silicon, and stainless steel, depending on the intended application.
Answer: The sputtering process involves DC or RF sputtering in an inert gas (usually argon) atmosphere at room temperature, with optimized power settings to achieve high-quality, stoichiometric films.
Lithium phosphate (Li₃PO₄) is an orthorhombic, wide-bandgap insulating ceramic composed of PO₄ tetrahedra and Li⁺ ions. Its chemical and thermal stability, low electronic conductivity, and moderate dielectric constant make it suitable for solid-state electrochemical applications. Li₃PO₄ is particularly valuable as a sputtering target because RF magnetron sputtering in a nitrogen-containing plasma can produce lithium phosphorus oxynitride (LiPON), an amorphous solid electrolyte with improved Li⁺ conductivity, strong electronic insulation, and excellent electrochemical stability. Sputtered LiPON layers provide dense, pinhole-free electrolyte films for thin-film and solid-state batteries. Applications include microbatteries for MEMS, wearable and implantable electronics, electrochromic devices, and other miniaturised energy-storage systems.
Key Properties of Lithium Phosphate
Property
Value
Significance
Chemical Formula
Li3PO4
Confirms stoichiometric lithium orthophosphate composition required for consistent reactive-nitrogen sputtering into LiPON
CAS Number
10377-52-3
Unique registry identifier used for procurement, customs, and safety documentation
Molar Mass
~115.79 g/mol
Basis for stoichiometric powder blending, target mass calculations, and deposition rate estimates
Density (theoretical)
~2.42 g/cm3
Benchmark for evaluating sintered target bulk density and expected sputtered-film packing density
Melting Point
~837 C
Defines the thermal processing window for hot-pressing and sintering the ceramic target
Crystal Structure
Orthorhombic (beta-Li3PO4)
Governs Li+ ion diffusion pathways within the lattice and resulting film microstructure after deposition
Dielectric Constant
~6-7 (temperature dependent)
Relevant to electrical isolation performance when the film is used as a solid electrolyte or dielectric layer
Magnetic Type
Diamagnetic
Confirms the material introduces no magnetic interference in RF or DC magnetron sputtering chambers
Types & Grades of Lithium Phosphate
Lithium Phosphate targets are offered in standard catalogue sizes and grades, with custom purity, density, and geometry available for OEM and R&D deposition systems.
Grade / Form
Typical Purity
Key Features / Uses
Standard Grade
99.5% (2N5)
General R&D sputtering trials and process screening where cost efficiency outweighs trace-impurity sensitivity
High-Purity Grade
99.9% (3N)
Standard grade for LiPON electrolyte film production in most thin-film battery prototyping
Ultra-High-Purity Grade
99.99% (4N)
Low-defect films for solid-state battery electrolytes where trace-metal contamination must be minimised
Research Grade
99.999% (5N)
Fundamental ionic-conductivity and interface studies requiring minimal trace-metal background
Custom Bonded Target
99.9%+, indium or elastomer bonded to Cu backing plate
Improved thermal dissipation for higher-power magnetron sputtering runs and longer target life
Applications of Lithium Phosphate
Sputtered films of Lithium Phosphate support demanding roles across research and production applications where this material’s specific structural, electronic, or optical properties are the key requirement.
Industry
Application
Function
Solid-State Batteries
LiPON solid-electrolyte deposition
Reactive N2 sputtering converts the target into an amorphous lithium phosphorus oxynitride ion-conducting barrier layer.
Consumer & Wearable Electronics
Thin-film microbattery fabrication
Enables all-solid-state cells with long shelf life, no leakage risk, and compatibility with wafer-scale integration
Electrochromic Devices
Ion-storage and electrolyte layers in smart windows
Provides Li+ ion transport combined with electronic insulation within the electrochromic stack
MEMS & Microelectronics
Dielectric and encapsulation layers
Serves as a lithium source and protective dielectric barrier in microfabricated devices
Optical Coatings
Low-index dielectric thin films
Deposits transparent films with tunable dielectric properties for multilayer optical stacks
Battery R&D
Reference electrolyte films for interface studies
Well-characterised model material for studying solid electrolyte interphase behaviour at electrode surfaces
Why Partner with Infinita Materials?
Technical Depth: in-house quality control with ICP-MS and XRF purity verification, density measurement, and full certificates of analysis on every target.
Global Logistics: reliable supply from single R&D-scale targets to production-line volumes, with established international shipping.
Responsive Support: direct access to materials engineers for grade, bonding, and geometry selection, and process-compatibility questions.
Take the Next Step
Infinita Materials fabricates Lithium Phosphate sputtering targets engineered to the purity, density, and geometry your deposition process requires. Whether the requirement is a standard catalogue target or a custom size, purity, or bonded assembly, our team can help match the right specification to your deposition system. Request a quote or speak with our technical team to discuss your target specification.
Other Related Product to Lithium Phosphate, Li3PO4
Due to its high ionic conductivity and stability, Lithium Phosphate is commonly used in sputtering to create thin films for applications like solid-state batteries, thin-film capacitors, and optical coatings.
Li₃PO₄ offers excellent thermal stability, a wide electrochemical window, and good substrate adherence, making it ideal for energy storage and semiconductor devices.
Compared to other lithium compounds, Li₃PO₄ provides enhanced chemical stability, high purity, and consistent film quality, which is critical for high-performance devices.
The sputtering process involves DC or RF sputtering in an inert gas (usually argon) atmosphere at room temperature, with optimized power settings to achieve high-quality, stoichiometric films.
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