| Catalogue Code | IN-LiP-01 IN-LiP-02 |
| CAS No. | 10377-52-3 |
| Chemical Formula | Li3PO4 |
| Compound Name | Lithium Phosphate |
| Purity (%) | >99.9 |
| Dimensions | Dia. 1”, Thick. 0.125” Dia. 2”, Thick. 0.25” |
Introduction
Lithium phosphate (Li₃PO₄) sputtering targets are specialized materials used in thin-film deposition processes, particularly in applications requiring high-purity, durable, and stable coatings. Li₃PO₄ is a compound of lithium and phosphate ions known for its excellent ionic conductivity and chemical stability. These targets are frequently used in producing optical coatings, electrochemical sensors, and solid-state batteries. Their compatibility with advanced techniques, such as magnetron sputtering, makes them ideal for creating uniform and high-quality thin films in research and industrial applications.
Properties
The table below contains all the critical properties of Lithium Phosphate:
| Properties | Description |
| Appearance and Shape | Solid, Thin film, Disc |
| Molar mass | 115.79 g/mol |
| Magnetic Type | Diamagnetic |
| Density | ~ 2.42 g/cm³ |
| Dielectric Constant | ~ 6-7 (varies with temperature) |
| Melting Point | ~ 837°C |
Application
Lithium phosphate (Li3PO4) has many applications, including:
- Optoelectronic devices: Utilized to prepare thin films for applications such as light-emitting diodes (LEDs) and solar cells.
- Coatings for corrosion resistance: Ideal for protective coatings in devices exposed to harsh environmental conditions.
- Lithium-ion batteries: Li3PO4 is a component of the electrolyte in lithium-ion batteries. It can also be used as a coating to improve their electrochemical performance.
- Solid-state batteries: Li3PO4 is a solid electrolyte material for all-solid-state lithium batteries. Its amorphous form has low interfacial resistance and can be deposited at ambient temperatures.
- Deposition Processes: Utilized in deposition techniques such as semiconductor deposition, chemical vapor deposition (CVD), and physical vapor deposition (PVD).
FAQs
Answere: Due to its high ionic conductivity and stability, Lithium Phosphate is commonly used in sputtering to create thin films for applications like solid-state batteries, thin-film capacitors, and optical coatings.
Answere: Li₃PO₄ offers excellent thermal stability, a wide electrochemical window, and good substrate adherence, making it ideal for energy storage and semiconductor devices.
Answere: Compared to other lithium compounds, Li₃PO₄ provides enhanced chemical stability, high purity, and consistent film quality, which is critical for high-performance devices.
Answere: Li₃PO₄ thin films can be deposited on a range of substrates, including glass, silicon, and stainless steel, depending on the intended application.
Answere: The sputtering process involves DC or RF sputtering in an inert gas (usually argon) atmosphere at room temperature, with optimized power settings to achieve high-quality, stoichiometric films.
sachin
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