Lithium Niobate, LiNbO3
Lithium niobate (LiNbO3) sputtering targets from Infinita Materials deliver the high-density, high-purity ferroelectric oxide source material required for thin-film piezoelectric, electro-optic, and integrated photonic device fabrication. Supplied as precision-machined discs in standard 1 in and 2 in diameters, each target is manufactured to tight compositional and density tolerances to support reproducible RF and pulsed-DC magnetron sputtering.
| Purity (%) : | >99.9 |
| Dimensions : | Dia. 1”, Thick. 0.125” Dia. 2”, Thick. 0.25” |
Introduction to Lithium Niobate
Lithium niobate (LiNbO₃) crystallises in a trigonal R3c structure with distorted octahedral coordination, producing strong spontaneous polarisation and pronounced piezoelectric, pyroelectric, electro-optic, and nonlinear optical properties. Its broad optical transparency and high chemical and thermal stability make precise Li stoichiometry important for consistent film performance. Sputtering from ceramic LiNbO₃ targets enables wafer-scale thin-film deposition on silicon, sapphire, and other substrates with controlled thickness and composition. Sputtered LiNbO₃ films are central to thin-film lithium niobate (TFLN) platforms for high-speed optical modulators and integrated photonics, as well as SAW filters, RF resonators, and pyroelectric sensors, where uniform, low-temperature deposition is advantageous.
Introduction to Lithium Niobate
Lithium niobate (LiNbO₃) crystallises in a trigonal R3c structure with distorted octahedral coordination, producing strong spontaneous polarisation and pronounced piezoelectric, pyroelectric, electro-optic, and nonlinear optical properties. Its broad optical transparency and high chemical and thermal stability make precise Li stoichiometry important for consistent film performance. Sputtering from ceramic LiNbO₃ targets enables wafer-scale thin-film deposition on silicon, sapphire, and other substrates with controlled thickness and composition. Sputtered LiNbO₃ films are central to thin-film lithium niobate (TFLN) platforms for high-speed optical modulators and integrated photonics, as well as SAW filters, RF resonators, and pyroelectric sensors, where uniform, low-temperature deposition is advantageous.
Key Properties of Lithium Niobate
| Property | Value | Significance |
|---|
| Chemical formula | LiNbO3 | Defines the fixed Li: Nb:O stoichiometry underlying the material’s ferroelectric and piezoelectric behaviour |
| CAS number | 12031-63-9 | Unique identifier used for procurement, safety documentation, and regulatory compliance |
| Molar mass | ~147.85 g/mol | Basis for stoichiometric batching calculations and deposition rate modelling |
| Density (theoretical) | ~4.64 g/cm3 | Reference value for evaluating target relative density and calibrating film mass-thickness monitors |
| Crystal structure | Trigonal, R3c space group (perovskite-related) | Governs the anisotropic optical, piezoelectric, and pyroelectric response of deposited films |
| Melting point | ~1257 C | Sets the practical ceiling for target sintering and hot-press fabrication temperatures |
| Thermal conductivity | ~5 W/m-K | Affects heat dissipation across the target during high-power magnetron sputtering |
| Curie temperature | ~1140- 1210 °C | Marks the ferroelectric-to-paraelectric transition relevant to film poling and crystallinity control |
Types & Grades of Lithium Niobate
Lithium Niobate targets are offered in standard catalog sizes and grades, with custom purity, density, and geometry available for OEM and R&D deposition systems.
| Grade / Form | Typical Purity | Key Features / Uses |
|---|
| Standard planar disc target | 99.9% (3N) | General-purpose RF sputtering for piezoelectric films and SAW device layers |
| High-purity target | 99.99% (4N) | Preferred for integrated photonics and low-optical-loss waveguide deposition |
| Ultra-high-purity target | 99.999% (5N) | Research-grade films for nonlinear optics, frequency conversion, and precision photonic circuits |
| Bonded target (indium or elastomer) | 99.9% – 99.99% | Configured for high-power magnetron systems requiring enhanced thermal contact with the backing plate |
| Custom stoichiometry (congruent or near-stoichiometric) | 99.9% and above | Tailored Li/Nb ratio to optimise congruent versus near-stoichiometric film performance for specific device designs |
Applications of Lithium Niobate
Sputtered films of Lithium Niobate support demanding roles across research and production applications where this material’s specific structural, electronic, or optical properties are the key requirement.
| Industry | Application | Function |
|---|
| Integrated photonics | Thin-film lithium niobate (TFLN) waveguides and modulators | Provides a high electro-optic coefficient enabling high-speed, low-drive-voltage optical modulation |
| Telecommunications | RF and optical modulators, acousto-optic devices | Supports high-frequency signal encoding and beam-steering functions in transmission systems |
| Consumer electronics | Surface acoustic wave (SAW) filters for mobile RF front-ends | Delivers frequency-selective filtering for signal isolation in compact device architectures |
| Sensing | Pyroelectric and piezoelectric sensor elements | Converts thermal or mechanical stimuli into measurable electrical signals |
| Aerospace and defense | Precision oscillators and radar-related acousto-optic components | Maintains stable frequency control under demanding environmental conditions |
| Quantum and nonlinear optics research | Frequency conversion elements and on-chip quantum photonic circuits | Exploits strong second-order nonlinear optical coefficients for wavelength conversion |
Why Partner with Infinita Materials?
- Technical Depth: in-house quality control with ICP-MS and XRF purity verification, density measurement, and full certificates of analysis on every target.
- Global Logistics: reliable supply from single R&D-scale targets to production-line volumes, with established international shipping.
- Responsive Support: direct access to materials engineers for grade, bonding, and geometry selection, and process-compatibility questions.
Take the Next Step
Infinita Materials fabricates Lithium Niobate sputtering targets engineered to the purity, density, and geometry your deposition process requires. Whether the requirement is a standard catalogue target or a custom size, purity, or bonded assembly, our team can help match the right specification to your deposition system. Request a quote or speak with our technical team to discuss your target specification.
Frequently Asked Questions
What sizes are available in the standard catalogue?
Catalogue codes IN-LiNb-01 and IN-LiNb-02 correspond to 1 in diameter x 0.125 in thick and 2 in diameter x 0.25 in thick discs respectively; custom diameters, rectangular formats, and bonded assemblies can be produced on request.
Should I choose a Monoblock or bonded target?
Monoblock targets suit standard RF sputtering setups, while indium- or elastomer-bonded targets improve thermal contact with the backing plate and are recommended for higher-power magnetron sputtering systems.
Lithium Niobate, LiNbO3
Used in Various Industries
Biomedical
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Aerospace
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