| Catalogue Code | IN-Ta-01 IN-Ta-02 |
| CAS No. | 1314-61-0 |
| Chemical Formula | Ta2O5 |
| Compound Name | Tantalum Oxide |
| Purity (%) | >99.9 |
| Dimensions | Dia. 1”, Thick. 0.125” Dia. 2”, Thick. 0.25” |
Introduction
Tantalum oxide (Ta₂O₅) sputtering targets are key materials used in thin-film deposition processes, particularly in applications such as semiconductor manufacturing, optical coatings, and high-performance capacitors. As a highly stable and refractory compound, Ta₂O₅ exhibits excellent thermal and chemical resistance, making it ideal for the creation of thin films with high dielectric constants, contributing to the performance and reliability of electronic devices. The sputtering process involving Ta₂O₅ targets enables precise film thickness and composition control, making it essential for advanced technological applications in microelectronics and optics.
Properties
The table below outlines the essential properties of Tantalum Oxide (Ta₂O₅):
| Property | Description |
| Molar mass | ~441.89 g/mol |
| Density | ~8.2 g/cm³ |
| Melting Point | ~1872°C |
| Shape and Appearance | Solid, Thin film, Disc, or rectangular |
| Thermal Conductivity | ~3.5 W/(m·K) |
| Magnetic Properties | Diamagnetic |
Applications of Tantalum Oxide (Ta₂O₅)
- High-k Dielectric Layers: These are utilized in capacitors and transistors due to their high dielectric constant and insulating properties.
- Optical Coatings: Used for anti-reflective, protective, and transparent coatings in lenses and optical devices.
- Semiconductor Devices: Applied as a gate oxide material in advanced semiconductor manufacturing.
- Protective Coatings: Provides corrosion-resistant coatings for sensitive components in harsh environments.
- Photonic Applications: Integrated into waveguides and other photonic devices for its excellent refractive index.
FAQs
Answere: Ta₂O₅’s high dielectric constant and stability make it ideal for enhancing the performance of capacitors and transistors in microelectronics.
Answere: With its optical transparency and durability, Ta₂O₅ is used for anti-reflective and protective coatings in optical systems.
Answere: Ta₂O₅ is a preferred material for gate oxides and insulating layers in advanced semiconductor devices.
Answere: Ta₂O₅ exhibits good thermal stability, making it suitable for high-temperature processes during film deposition.
Answere: Ta₂O₅ provides excellent corrosion resistance and is often used as a protective coating in chemically aggressive environments.
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