| Catalogue Code | IN-AlInZn-01 IN-AlInZn-02 |
| Chemical Formula | In2O3/Al2O3/ZnO 65/16/19 wt% |
| Compound Name | Indium Aluminum Zinc Oxide |
| Purity (%) | >99.9 |
| Dimensions | Dia. 1”, Thick. 0.125” Dia. 2”, Thick. 0.25” |
Introduction
Indium aluminum zinc oxide sputtering targets are made up of indium oxide, aluminum oxide, and zinc oxide with the chemical formula In2O3/Al2O3/ZnO. The composition ratios are 65, 16, and 19 wt%, respectively. High-purity indium aluminum zinc oxide sputtering targets are essential in deposition operations to ensure a high-quality deposited layer. IAZO has a cubic crystal structure with a lattice parameter of approximately 10.15 Å. The crystal structure of IAZO can be described as a substitutional solid solution of In₂O₃, Al₂O₃, and ZnO, where some indium atoms are replaced by aluminum and zinc atoms.
Properties
The table below contains all the critical properties of Indium aluminum zinc oxide :
| Properties | Indium Oxide | Aluminum Oxide | Zinc Oxide |
| Chemical Formula | In₂O₃ | Al₂O₃, | ZnO |
| Appearance | Yellowish to transparent | White, crystalline powder | White or yellow powder |
| Molar mass | 277.64 g/mol | 101.96 g/mol | 81.38 g/mol |
| Magnetic Type | Diamagnetic | Diamagnetic | Diamagnetic |
| Density | ~ 9-10 g/cm³ | ~ 9-10 g/cm³ | ~8.5 g/cm³ |
| Melting Point | ~ 1,910 °C | 2,072 °C | 1,975 °C |
Applications
Indium aluminum zinc oxide (IAZO) is a transparent conducting oxide (TCO) with excellent electrical and optical properties, making it ideal for use in optoelectronics, solar cells, and touch panels:
- Optoelectronics: IAZO’s high electron mobility, good transparency, and low resistivity make it ideal for optoelectronics.
- Solar cells: IAZO’s excellent electrical and optical properties make it ideal for solar cells.
- Touch panels: IAZO’s excellent electrical and optical properties make it ideal for touch panels.
- Transparent Conductive Films (TCFs): Used in touch screens, displays, and solar cells for high transparency and electrical conductivity.
- Thin-film transistors (TFTs): Employed in active-matrix displays like OLED and LCD due to their high mobility and low processing temperatures.
- Semiconductor Devices: Applied in flexible electronics for high-performance and low-cost semiconductor layers.
- Gas Sensors: Utilized in environmental monitoring to detect gases like ozone and hydrogen.
FAQs
Answere: IAZO targets are typically used in physical vapor deposition (PVD) processes such as RF or DC magnetron sputtering.
Answere: The quality of IAZO thin films depends on parameters like: Substrate temperature Sputtering power and pressure Gas composition (e.g., argon and oxygen ratio)
Answere: IAZO targets come in various sizes, compositions, and purities (e.g., >99.9%). The exact specifications depend on the application and equipment used.
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