Introduction to Lead Zirconium Titanate
PZT (lead zirconate titanate) crystallises in the perovskite ABO₃ structure, with Pb²⁺ occupying the A-site and Zr⁴⁺/Ti⁴⁺ sharing the B-site. Near the morphotropic phase boundary (~52% Zr/48% Ti), coexisting tetragonal and rhombohedral phases produce enhanced piezoelectric, dielectric, and electromechanical properties. Below its Curie temperature of approximately 350–390 °C, PZT exhibits strong ferroelectric, piezoelectric, and pyroelectric behaviour. Sputtering from dense ceramic PZT targets enables controlled Zr/Ti and Pb stoichiometry, uniform thickness, and wafer-scale integration. PZT thin films are widely used in piezoelectric MEMS actuators, FeRAM capacitors, micromachined ultrasonic transducers, sensors, and other ferroelectric devices requiring precise, patterned thin-film architectures.
Types & Grades of Lead Zirconium Titanate
Lead Zirconium Titanate targets are offered in standard catalogue sizes and grades, with custom purity, density, and geometry available for OEM and R&D deposition systems.
| Grade / Form | Typical Purity | Key Features / Uses |
|---|
| Standard PZT-52/48 (MPB composition) target | 99.9% | Balanced piezoelectric and dielectric properties; the default choice for general MEMS actuator and sensor films |
| Nb-doped (‘soft’) PZT target | 99.9% – 99.99% | Elevated piezoelectric coefficients and dielectric constant for high-sensitivity actuators and transducers |
| La-doped PLZT target | 99.9% | Improved optical transparency and electro-optic response for optical shutter and memory-related films |
| High-density / hot-pressed target | 99.95% and above | Minimised porosity for low-particulate RF sputtering of thicker, higher-quality films |
| Custom off-stoichiometry (Pb-excess) target | Custom | Compensates for preferential lead loss during sputtering to preserve as-deposited film stoichiometry |
Applications of Lead Zirconium Titanate
Sputtered films of Lead Zirconium Titanate support demanding roles across research and production applications where this material’s specific structural, electronic, or optical properties are the key requirement.
| Industry | Application | Function |
|---|
| MEMS | Piezoelectric micro-actuators and cantilevers | Converts an applied electric field into precise, repeatable mechanical displacement |
| Semiconductor memory | Ferroelectric RAM (FeRAM) capacitors | Nonvolatile switchable polarisation state stores binary data at low switching voltage |
| Medical devices | Ultrasound transducers and micromachined imaging arrays (pMUTs) | Piezoelectric films generate and detect acoustic pressure waves for diagnostic imaging |
| RF and wireless | Surface and bulk acoustic wave (SAW/BAW) filters and resonators | Piezoelectric coupling enables sharp, frequency-selective signal filtering |
| Energy harvesting | Vibration-based micro energy harvesters | Converts ambient mechanical vibration into usable electrical power |
| Sensors | Pressure, accelerometer, and pyroelectric infrared sensors | Piezoelectric and pyroelectric response converts mechanical or thermal stimuli into electrical signal |
Take the Next Step
Infinita Materials fabricates Lead Zirconium Titanate sputtering targets engineered to the purity, density, and geometry your deposition process requires. Whether the requirement is a standard catalogue target or a custom size, purity, or bonded assembly, our team can help match the right specification to your deposition system. Request a quote or speak with our technical team to discuss your target specification.
