Lithium zirconate (Li2ZrO3) is a lithium-bearing ceramic oxide supplied by Infinita Materials as a high-purity sputtering target for depositing thin, lithium-conducting oxide films. It combines a stable, wide-bandgap ceramic host with mobile lithium ions, making it a target material of choice for solid-state battery interface research and lithium-oxide thin-film studies.
Li₂ZrO₃ crystallises in a monoclinic, rock-salt-derived structure (C2/c), with ordered Li and Zr cations occupying octahedral sites within a close-packed oxygen framework. Its layered cation arrangement supports Li⁺ transport, while the Zr–O network provides chemical and thermal stability. As a wide-bandgap insulating oxide, Li₂ZrO₃ is typically deposited by RF magnetron sputtering from dense ceramic targets, enabling controlled Li: Zr stoichiometry and uniform thin films. The material is also reactive toward atmospheric CO₂, making surface protection important during storage while supporting CO₂-sorption research. Sputtered Li₂ZrO₃ films are investigated as protective interlayers and artificial SEI coatings, dielectric layers, and reactive CO₂-capture coatings for sensors and membrane technologies.
Answer: Lithium Zirconate is a sputtering target for thin-film deposition in various applications, such as solid-state batteries, electronic devices, and energy storage systems.
Answer: Li₆Zr₂O₇ offers high thermal stability, good mechanical properties, and effective ionic conductivity, making it ideal for thin-film production in high-performance energy devices.
Answer: Yes, it can be used in reactive sputtering to form lithium-based films, often in combination with other elements like oxygen to create functional oxide layers.
Answer: Challenges include its high melting point and potential brittleness, which can lead to target degradation over time, especially under high-power sputtering conditions.
Answer: Li₆Zr₂O₇ is commonly used to create lithium-based oxide films for applications in batteries, capacitors, and electronic components due to its excellent dielectric properties.
Li₂ZrO₃ crystallises in a monoclinic, rock-salt-derived structure (C2/c), with ordered Li and Zr cations occupying octahedral sites within a close-packed oxygen framework. Its layered cation arrangement supports Li⁺ transport, while the Zr–O network provides chemical and thermal stability. As a wide-bandgap insulating oxide, Li₂ZrO₃ is typically deposited by RF magnetron sputtering from dense ceramic targets, enabling controlled Li: Zr stoichiometry and uniform thin films. The material is also reactive toward atmospheric CO₂, making surface protection important during storage while supporting CO₂-sorption research. Sputtered Li₂ZrO₃ films are investigated as protective interlayers and artificial SEI coatings, dielectric layers, and reactive CO₂-capture coatings for sensors and membrane technologies.
Key Properties of Lithium Zirconate
Property
Value
Significance
Crystal structure
Monoclinic, space group C2/c (rock-salt-derived, cation-ordered)
Governs Li+ transport pathways and the crystallinity/orientation of as-deposited and annealed films
Molar mass
~153.1 g/mol
Used to calculate stoichiometric deposition rates and target consumption per film thickness
Density (theoretical, monoclinic)
~4.3 g/cm3
Affects sputter yield, target erosion rate, and achievable film density
Electronic character
Wide-bandgap insulator (~5-6 eV)
Requires RF (not DC) magnetron sputtering due to the target’s low electrical conductivity
Lithium-ion conductivity
~10^-6 to 10^-4 S/cm, strongly dependent on microstructure and temperature
Determines suitability of sputtered films as solid-electrolyte interlayers versus purely protective coatings
Thermal conductivity
~3-5 W/m-K
Influences thermal gradient management on the target surface during sustained sputtering
Thermal/decomposition behaviour
Does not sharply melt; decomposes at high temperature rather than liquefying cleanly.
Favours PVD/sputtering over thermal evaporation for controlled, stoichiometric film deposition
Reactivity with CO2 and moisture
Reacts with atmospheric CO2/H2O to form Li2CO3 and ZrO2 at exposed surfaces
Requires controlled-atmosphere storage and handling of the target; also the basis of Li2ZrO3’s use as a CO2-sorbent film material
Types & Grades of Lithium Zirconate
Lithium Zirconate targets are offered in standard catalogue sizes and grades, with custom purity, density, and geometry available for OEM and R&D deposition systems.
Grade / Form
Typical Purity
Key Features / Uses
Standard catalogue disc (IN-LiZr-01)
>99.9%
1in diameter x 0.125in thick; RF sputtering for lab-scale and R&D deposition runs
Standard catalogue disc (IN-LiZr-02)
>99.9%
2in diameter x 0.25in thick; pilot-line and extended-run coating trials
High-purity grade
99.99% – 99.999% (4N-5N)
Reduced alkali and transition-metal trace impurities for battery-interface and electrochemical research where trace contamination affects Li+ transport
Large-format / custom planar target
99.9% – 99.99%
Rectangular, square, and oversized round plates sized for production in-line and batch coaters
Bonded / rotary target assembly
99.9% – 99.99%
Indium- or elastomer-bonded to copper backing plates, or supplied as cylindrical rotary targets for high-throughput industrial sputtering
Applications of Lithium Zirconate
Sputtered films of Lithium Zirconate support demanding roles across research and production applications where this material’s specific structural, electronic, or optical properties are the key requirement.
Industry
Application
Function
Solid-state batteries
Protective interlayers on lithium-metal anodes
Suppresses dendrite growth and parasitic reactions at the Li-metal/electrolyte interface
Solid-state batteries
Artificial SEI / interfacial coatings on cathodes or garnet electrolytes
Lowers interfacial resistance and improves cycling stability of solid-state cells
Gas separation and sensing
CO2-capture sorbent and sensor thin films
Reversibly reacts with CO2 to form Li2CO3 + ZrO2, enabling thin-film CO2 uptake studies and sensor coatings
Semiconductor/microelectronics
Insulating dielectric layers in multilayer stacks
Provides an electrically insulating, chemically stable oxide layer between conductive layers
Optical coatings
Protective and interference oxide layers
Chemically stable oxide overcoat for optical components and multilayer stacks
Nuclear / fusion materials research
Thin-film analogues of lithium ceramic breeder materials
Supports diagnostic and test-structure studies related to lithium ceramic tritium-breeder blanket concepts
Why Partner with Infinita Materials?
Technical Depth: in-house quality control with ICP-MS and XRF purity verification, density measurement, and full certificates of analysis on every target.
Global Logistics: reliable supply from single R&D-scale targets to production-line volumes, with established international shipping.
Responsive Support: direct access to materials engineers for grade, bonding, and geometry selection, and process-compatibility questions.
Take the Next Step
Infinita Materials fabricates Lithium Zirconate sputtering targets engineered to the purity, density, and geometry your deposition process requires. Whether the requirement is a standard catalogue target or a custom size, purity, or bonded assembly, our team can help match the right specification to your deposition system. Request a quote or speak with our technical team to discuss your target specification.
Other Related Product to Lithium Zirconate, Li6Zr2O7
Lithium Zirconate is a sputtering target for thin-film deposition in various applications, such as solid-state batteries, electronic devices, and energy storage systems.
Li₆Zr₂O₇ offers high thermal stability, good mechanical properties, and effective ionic conductivity, making it ideal for thin-film production in high-performance energy devices.
Yes, it can be used in reactive sputtering to form lithium-based films, often in combination with other elements like oxygen to create functional oxide layers.
Challenges include its high melting point and potential brittleness, which can lead to target degradation over time, especially under high-power sputtering conditions.
Li₆Zr₂O₇ is commonly used to create lithium-based oxide films for applications in batteries, capacitors, and electronic components due to its excellent dielectric properties.
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