Iron Oxide, Fe2O3

Iron oxide (Fe2O3) sputtering targets from Infinita Materials deliver a dense, high-purity ceramic source for depositing hematite and related iron oxide thin films used in gas sensors, photoelectrochemical devices, magnetic layers, and protective coatings. Each target is fabricated to controlled stoichiometry and grain structure to support stable, reproducible RF and DC magnetron sputtering runs. Standard 1 in and 2 in disc formats are stocked, with custom diameters, thicknesses, and bonded assemblies produced to specification.

Purity (%) :>99.9
Dimensions :Dia. 1”, Thick. 0.125” Dia. 2”, Thick. 0.25”
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Introduction to Iron Oxide

Iron(III) oxide (Fe₂O₃) is most commonly found as hematite, a stable corundum-structured oxide with antiferromagnetic behaviour and a visible-light bandgap of approximately 2.0–2.2 eV. Depending on sputtering conditions, Fe₂O₃ can also form maghemite or transform toward other iron-oxide phases, enabling tuning of magnetic and electronic properties. As a sputtering target, Fe₂O₃ provides dense, compositionally controlled films with uniform thickness and reproducible microstructure. RF magnetron sputtering is used for gas sensors, photoanodes for solar water splitting, antiferromagnetic exchange-bias layers, magnetic devices, and functional glass coatings. Its abundance, low cost, and relatively low toxicity further support scalable applications.

FAQs

Question: What are the primary uses of iron oxide sputtering targets?

Answer: Iron oxide sputtering targets are primarily used for thin-film deposition in magnetic storage media, optoelectronic devices, sensors, and catalysis. They also find applications in spintronics and biomedical coatings. 

Question:  What are iron oxide sputtering targets' standard shapes and sizes?

Answer: Commonly available in circular disks (1–6 inches in diameter) or rectangular plates, with thicknesses typically ranging from 0.125 to 0.5 inches. Custom shapes and sizes can also be fabricated based on specific application needs.

Question: What properties make iron oxide suitable for sputtering?

Answer: Iron oxide's magnetic properties, thermal stability, and ability to form uniform, durable thin films make it ideal for advanced electronics, magnetic devices, and sensors. 

Question: Which sputtering method is recommended for Fe2O3 targets?

Answer: RF magnetron sputtering is generally recommended because Fe2O3 is a poorly conductive ceramic; pulsed DC magnetron sputtering is also used, particularly for larger-area or higher-throughput deposition.