| Catalogue Code | IN-Mn-01 IN-Mn-02 |
| CAS No. | 1313-13-9 |
| Chemical Formula | MnO2 |
| Compound Name | Manganese Oxide |
| Purity (%) | >99.9 |
| Dimensions | Dia. 1”, Thick. 0.125” Dia. 2”, Thick. 0.25” |
Introduction
Manganese Oxide (MnO₂) is a sputter target for thin film deposition due to its excellent electrochemical, catalytic, and electronic properties. When used in sputtering, MnO₂ produces high-quality, uniform films that are ideal for applications in energy storage devices like lithium-ion batteries and supercapacitors, as well as in sensors and magnetic thin films. The high purity of MnO₂ sputter targets (typically ≥99.99%) ensures consistent and reliable film deposition, crucial for achieving optimal performance in advanced technologies. These films are also used in catalysis for fuel cells and other electrochemical devices, benefiting from the material’s stability and conductivity.
Properties of manganese Oxide
The table below presents the manganese oxide properties:
| Properties | Details |
| Appearance | Solid/ Circular, disc, and rectangle. |
| Molar Mass | 86.9368 g/mol |
| Density | 5.026 g/cm3 |
| Thermal Conductivity | 1–5 W/m·K |
| Melting Point | 535 °C (995 °F; 808 K) |
| Magnetic Nature | It is a non-magnetic material |
Applications
Manganese Oxide (MnO2) targets possess specific unique properties, which lead to its application as a thin-film deposition. Some of these applications are listed below:
- Electrode Material: MnO2 thin films are used as electrodes in lithium-ion batteries and supercapacitors to enhance energy storage performance.
- Catalytic Coatings: Catalytic layers prepared by MnO2-based thin film sputtering exhibit enhanced reaction kinetics and overall performance efficiency in fuel cells and other electrochemical devices.
- Thin Magnetic Films: MnO₂ targets assist in creating thin films of magnetic materials that play a significant role in storage and sensing applications.
- Dielectric Layers: It assists in preparing dielectric layers for capacitors and other forms of microelectronic structures, whose insulating properties make them valuable.
- Optoelectronics: MnO₂ sputter targets form transparent conductive films in displays, solar cells, and other optoelectronic devices.
- Protective Coatings: Manganese dioxide targets have extensive applications as protective coatings in various industrial operations. They enhance wear resistance and corrosion protection in such applications.
FAQs
Answere: MnO₂ sputter target is a high-purity material used in sputter deposition, a type of thin-film deposition. The MnO₂ target deposits manganese oxide films onto substrates, commonly used in applications such as batteries, sensors, and semiconductors.
Answere: Sputter targets of MnO₂ should be kept in a clean and dry environment to avoid contamination. They should be kept away from moisture and other contaminants that can affect the degradability of the target's quality. When handling, put on gloves to prevent oils and residue in your hands from contaminating the target.
Answere: MnO₂ targets are often used in RF sputtering due to their insulating nature, although DC sputtering can be employed with reactive gases like oxygen.
sachin
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